Publication details
Formation of excited Ag atoms in sputtering of silver
Journal Article
serial: Physical Review. B vol.68, 11 (2003), p. 1154261-1154265
research: CEZ:AV0Z2067918
project(s): ME 469GA MŠk, ME 328GA MŠk
keywords: ionisation, collision processes, sputtering
abstract (eng):
A model is presented of the formation of escited Ag.sup.*.sup. (4d.sup.9 .sup.5s.sup.2.sup.) atoms during sputtering of Ag metal by energetic Ar.sup.+.sup. ions. The essential part of the formation process is the slow diffusion of 4d-holes in the collision cascade from the sites of violet Ag-Ag collisions to the emitted Ag atoms. Computer simulation of Ag cascades and of the 4d-hole trasnport allows us to quantify the model and to describe all characteristic features of the available experimental data, in particular the fact that the sputtered Ag.sup.*.sup. atoms exhibit a narrower kinetic energy distribution than those ejected in the electronic ground state.
Cosati: 20K
RIV: BM